By Topic

Characterization of Wet Batch Cleaning Process in Advanced Semiconductor Manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Shrawan Singhal ; Dept. of Mech. Eng., Univ. of Texas at Austin, Austin, TX, USA ; Bassam Elkhatib ; John Stuber ; S. V. Sreenivasan
more authors

Author(s)

Shrawan Singhal
Dept. of Mech. Eng., Univ. of Texas at Austin, Austin, TX, USA
Bassam Elkhatib ; John Stuber ; S. V. Sreenivasan ; Ofodike A. Ezekoye