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Kelvin probe force microscopy for potential distribution measurement of semiconductor devices

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2 Author(s)
Vatel, Olivier ; NTT LSI Laboratories, Morinosato Wakamiya, Atsugi‐shi, Kanagawa 243‐01, Japan ; Tanimoto, Masafumi

Author(s)

Vatel, Olivier
NTT LSI Laboratories, Morinosato Wakamiya, Atsugi‐shi, Kanagawa 243‐01, Japan
Tanimoto, Masafumi