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Transport model of charged particle behavior in the afterglow region of a microwave generated oxygen plasma

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2 Author(s)
Wei, Ta‐Chin ; Department of Chemical Engineering, The Pennsylvania State University, 133 Fenske Laboratory, University Park, Pennsylvania 16802‐4400 ; Phillips, Jonathan

Author(s)

Wei, Ta‐Chin
Department of Chemical Engineering, The Pennsylvania State University, 133 Fenske Laboratory, University Park, Pennsylvania 16802‐4400
Phillips, Jonathan