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Nanoscale capacitance spectroscopy characterization of AlGaN/GaN heterostructure by current-sensing atomic force microscopy

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6 Author(s)
Zeng, Huizhong ; State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, People’s Republic of China ; Sun, Haoming ; Luo, Wenbo ; Wen Huang
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Author(s)

Zeng, Huizhong
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, People’s Republic of China
Sun, Haoming ; Luo, Wenbo ; Wen Huang ; Wang, Zhihong ; Li, Yanrong