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Erratic dislocations within funnel defects in AlN templates for AlGaN epitaxial layer growth

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7 Author(s)
Hawkridge, M.E. ; Materials Science Division, Lawrence Berkeley National Laboratory, 1 Cyclotron Road MS 62R0209/213, Berkeley, California 94720, USA ; Liliental-Weber, Z. ; Kim, H.J. ; Choi, S.
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Author(s)

Hawkridge, M.E.
Materials Science Division, Lawrence Berkeley National Laboratory, 1 Cyclotron Road MS 62R0209/213, Berkeley, California 94720, USA
Liliental-Weber, Z. ; Kim, H.J. ; Choi, S. ; Yoo, D. ; Ryou, J.-H. ; Dupuis, R.D.