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Epitaxial and polycrystalline HfNx (0.8≤x≤1.5) layers on MgO(001): Film growth and physical properties

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5 Author(s)
Seo, H.-S. ; Frederick Seitz Materials Research Laboratory and Materials Science Department, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801 ; Lee, T.-Y. ; Petrov, I. ; Greene, J.E.
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Author(s)

Seo, H.-S.
Frederick Seitz Materials Research Laboratory and Materials Science Department, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801
Lee, T.-Y. ; Petrov, I. ; Greene, J.E. ; Gall, D.

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