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Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

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8 Author(s)
Antos, Roman ; Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan ; Pistora, Jaromir ; Ohlidal, Ivan ; Postava, Kamil
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Author(s)

Antos, Roman
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan
Pistora, Jaromir ; Ohlidal, Ivan ; Postava, Kamil ; Mistrik, Jan ; Yamaguchi, Tomuo ; Visnovsky, Stefan ; Horie, Masahiro