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Quantitative evaluation of biaxial strain in epitaxial 3C-SiC layers on Si(100) substrates by Raman spectroscopy

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5 Author(s)
Rohmfeld, Stefan ; Institut für Technische Physik, Universität Erlangen-Nürnberg, Erwin-Rommel-Straße 1, D-91058 Erlangen, Germany ; Hundhausen, Martin ; Ley, L. ; Zorman, C.A.
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Author(s)

Rohmfeld, Stefan
Institut für Technische Physik, Universität Erlangen-Nürnberg, Erwin-Rommel-Straße 1, D-91058 Erlangen, Germany
Hundhausen, Martin ; Ley, L. ; Zorman, C.A. ; Mehregany, M.