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Microstructural characterization of rf sputtered polycrystalline silicon germanium films

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6 Author(s)
Choi, W.K. ; Microelectronics Laboratory, Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore ; Teh, L.K. ; Bera, L.K. ; Chim, W.K.
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Author(s)

Choi, W.K.
Microelectronics Laboratory, Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
Teh, L.K. ; Bera, L.K. ; Chim, W.K. ; Wee, A.T.S. ; Jie, Y.X.