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The temperature variation of the piezoelectric photo-thermal (PPT) signal intensity of semi-insulating (SI) GaAs from 20 to 150 K was measured. Four peaks at 50, 70, 110, and 125 K were observed in the PPT signal. From the theoretical analysis based on the rate equations of electrons in the conduction band and deep levels, we concluded that the observed four peaks were due to the nonradiative electron transitions through EL6, EL7, EL15, and an unspecified deep level, respectively. Deep levels with extremely low concentration (1012–1015 cm-3) were clearly identified in SI GaAs by using the PPT method. © 2001 American Institute of Physics.
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