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Measurement of the surface mean‐square atomic vibrational amplitude, or equivalently the surface Debye temperature, with reflection high‐energy electron diffraction is discussed. Low‐index surfaces of lead are used as examples. Particular details are given about the temperature‐dependent diffraction pattern of Pb(100) in the Debye–Waller region. The use of reflection high‐energy electron diffraction for measurement of the substrate surface temperature in thin‐film deposition chambers is suggested. © 1996 American Institute of Physics.
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