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11–13 GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

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5 Author(s)
Asaji, Toyohisa ; Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan and Development Center of Advanced Technology, Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305, Japan ; Kato, Yushi ; Sato, Fuminobu ; Iida, Toshiyuki
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Author(s)

Asaji, Toyohisa
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan and Development Center of Advanced Technology, Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305, Japan
Kato, Yushi ; Sato, Fuminobu ; Iida, Toshiyuki ; Saito, Junji