Skip to Main Content
IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards,
eBooks, and eLearning courses.
Learn more about:
IEEE Xplore subscriptions
Your organization might have access to this article on the publisher's site. To check,
click on this link:http://dx.doi.org/+10.1063/1.1488148
A driving scheme for improving the effective response of a microfabricated cantilever with an integrated thermal bimorph actuator is proposed for applications in high-throughput atomic-force microscopy. The essential part of the proposed scheme is a tuned boost filter (BSF), which is inserted in the setup for constant force imaging and which boosts the servo signal according to its frequency. Using this setup, an imaging bandwidth of 5 kHz was obtained within an actuation range of 1.7 μm. Constant force imaging with a tip velocity of 0.62 mm/s is demonstrated and the effectiveness of the BSF is verified. The improved bandwidth is gained at the expense of the achievable deflection range. An optimized system, therefore, requires not only a BSF but also a thermal bimorph with a large power to deflection efficiency. © 2002 American Institute of Physics.
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.