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Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy

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3 Author(s)
Akiyama, T. ; Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, CH-2007 Neuchâtel, Switzerland ; Staufer, U. ; de Rooij, N.F.

Author(s)

Akiyama, T.
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, CH-2007 Neuchâtel, Switzerland
Staufer, U. ; de Rooij, N.F.