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Three-dimensional beam tracking for optical lever detection in atomic force microscopy

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1 Author(s)
Nakano, Katsushi ; 1st R&D Department R&D Headquarters, Nikon Co., 1-6-3 Nishiohi Shinagawa-ku, Tokyo 140-8601, Japan

Author(s)

Nakano, Katsushi
1st R&D Department R&D Headquarters, Nikon Co., 1-6-3 Nishiohi Shinagawa-ku, Tokyo 140-8601, Japan