By Topic

Surface micromachining of a thin film microresonator using dry decomposition of a polymer sacrificial layer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
3 Author(s)
Patil, S.B. ; INESC Microsistemas e Nanotecnologias, Lisbon 1000–029, Portugal ; Chu, V. ; Conde, J.P.

Author(s)

Patil, S.B.
INESC Microsistemas e Nanotecnologias, Lisbon 1000–029, Portugal
Chu, V. ; Conde, J.P.