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Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal–oxide–semiconductor electronics

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9 Author(s)
Akiyama, T. ; Institute of Microtechnology, University of Neuchâtel, P.O. Box 3, CH-2007 Neuchâtel, Switzerland ; Staufer, U. ; de Rooij, N.F. ; Lange, D.
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Author(s)

Akiyama, T.
Institute of Microtechnology, University of Neuchâtel, P.O. Box 3, CH-2007 Neuchâtel, Switzerland
Staufer, U. ; de Rooij, N.F. ; Lange, D. ; Hagleitner, C. ; Brand, O. ; Baltes, H. ; Tonin, A. ; Hidber, H.R.