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Quantitative study of chemical mechanical planarization process affected by bare silicon wafer front surface topography

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3 Author(s)
Shan Xu, C. ; Lam Research Corporation, CMP Division, Fremont, California 94538 ; Liu, Jerry ; Xia, Yong

Author(s)

Shan Xu, C.
Lam Research Corporation, CMP Division, Fremont, California 94538
Liu, Jerry ; Xia, Yong