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A process dependent study of Al/Si/Cu very large scale integration metallization. I. Spectroscopic properties

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3 Author(s)
Hong, C. ; Motorola Inc., Austin, Texas 78721 ; Hance, R.L. ; Pyle, R.E.


Hong, C.
Motorola Inc., Austin, Texas 78721
Hance, R.L. ; Pyle, R.E.