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Field evaporation and electron induced local heating in scanning probe microscopes [atomic force microscope, scanning tunnel microscope (STM), and magnetic force microscope (MFM)] are investigated for a nanometer‐sized structure fabrication on an insulator and for a fine magnetic domain formation in a magnetic material. Application of negative voltage to the gold‐coated AFM probe can be provided to make gold lines 40 nm wide and dots 20 nm in diameter on SiO2/Si by field evaporation. Reversely, in a positive voltage, thermal processes are dominant, one of which is the formation of nanometer‐sized magnetic domains produced by electron induced local heating using STM and MFM. The proposed MFM recording can form 60×240 nm2 domains in a Pt/Co multilayer magnetic film and they can be observed with the same probe. © 1995 American Vacuum Society
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