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Pyrometric interferometry for real time molecular beam epitaxy process monitoring

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7 Author(s)
Bobel, F.G. ; Fraunhofer‐Institut für Integrierte Schaltungen, Wetterkreuz 13, D‐W‐8520 Erlangen, Germany ; Moller, H. ; Wowchak, A. ; Hertl, B.
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Author(s)

Bobel, F.G.
Fraunhofer‐Institut für Integrierte Schaltungen, Wetterkreuz 13, D‐W‐8520 Erlangen, Germany
Moller, H. ; Wowchak, A. ; Hertl, B. ; Van Hove, J. ; Chow, L.A. ; Chow, P.P.