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Growth and characterization of SiC epitaxial layers on Si- and C-face 4H SiC substrates by chemical-vapor deposition

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7 Author(s)
Ramaiah, Kodigala Subba ; Department of Electrical, Computer and System Engineering, Rensselaer Polytechnic Institute, 110 8th Street Troy, New York 12180 ; Bhat, I. ; Chow, T.P. ; Kim, J.K.
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Author(s)

Ramaiah, Kodigala Subba
Department of Electrical, Computer and System Engineering, Rensselaer Polytechnic Institute, 110 8th Street Troy, New York 12180
Bhat, I. ; Chow, T.P. ; Kim, J.K. ; Schubert, E.F. ; Johnstone, D. ; Akarca-Biyikli, S.