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Single-pulse excimer laser nanostructuring of silicon: A heat transfer problem and surface morphology

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4 Author(s)
Eizenkop, Julia ; Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA ; Avrutsky, Ivan ; Georgiev, Daniel G. ; Chaudchary, Vipin

Author(s)

Eizenkop, Julia
Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA
Avrutsky, Ivan ; Georgiev, Daniel G. ; Chaudchary, Vipin