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Depth profiling of strain and defects in Si/Si1-xGex/Si heterostructures by micro-Raman imaging

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4 Author(s)
Mitani, T. ; National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan ; Nakashima, S. ; Okumura, H. ; Ogura, A.

Author(s)

Mitani, T.
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
Nakashima, S. ; Okumura, H. ; Ogura, A.