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Correlation of quantitative Auger electron spectroscopy with secondary ion mass spectroscopic investigations of Al/Si/Cu VLSI metallization

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4 Author(s)
Stevens, H.A. ; Motorola, Inc., MD L1, Austin, Texas 78721 ; Hance, R.L. ; Hong, C. ; Pyle, R.E.

Author(s)

Stevens, H.A.
Motorola, Inc., MD L1, Austin, Texas 78721
Hance, R.L. ; Hong, C. ; Pyle, R.E.