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Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus

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2 Author(s)
Liu, Huiwen ; Nanotribology Laboratory for Information Storage and MEMS/NEMS, The Ohio State University, 206 West 18th Avenue, Columbus, Ohio 43210-1107 ; Bhushan, B.

Author(s)

Liu, Huiwen
Nanotribology Laboratory for Information Storage and MEMS/NEMS, The Ohio State University, 206 West 18th Avenue, Columbus, Ohio 43210-1107
Bhushan, B.