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Effect of surface polymerization on plasma and process stability in polycrystalline-silicon etching

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4 Author(s)
Xu, Songlin ; Applied Materials, Inc., 974 E. Arques Avenue, Sunnyvale, California 94086 ; Lill, Thorsten ; Deshmukh, Shashank ; Joubert, Olivier

Author(s)

Xu, Songlin
Applied Materials, Inc., 974 E. Arques Avenue, Sunnyvale, California 94086
Lill, Thorsten ; Deshmukh, Shashank ; Joubert, Olivier