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Optimization and characterization of remote plasma-enhanced chemical vapor deposition silicon nitride for the passivation of p-type crystalline silicon surfaces

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4 Author(s)
Lauinger, T. ; Institut für Solarenergieforschung Hameln-Emmerthal (ISFH), Am Ohrberg 1, D-31860 Emmerthal, Germany ; Moschner, J. ; Aberle, Armin G. ; Hezel, R.

Author(s)

Lauinger, T.
Institut für Solarenergieforschung Hameln-Emmerthal (ISFH), Am Ohrberg 1, D-31860 Emmerthal, Germany
Moschner, J. ; Aberle, Armin G. ; Hezel, R.