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Electrical simulation of scanning capacitance microscopy imaging of the pn junction with semiconductor probe tips

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6 Author(s)
OMalley, M.L. ; Lucent Technologies, Bell Laboratories, Murray Hill, New Jersey 07974 ; Timp, G.L. ; Timp, W. ; Moccio, S.V.
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Author(s)

OMalley, M.L.
Lucent Technologies, Bell Laboratories, Murray Hill, New Jersey 07974
Timp, G.L. ; Timp, W. ; Moccio, S.V. ; Garno, J.P. ; Kleiman, R.N.