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Direct observation of strained substrate in graded Si1-xGex/Si heterostructures

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2 Author(s)
Tao, M. ; Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 ; Lyding, J.W.

Author(s)

Tao, M.
Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Lyding, J.W.