Skip to Main Content
| Create Account
| Sign In
IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards,
eBooks, and eLearning courses.
Learn more about:
IEEE Xplore subscriptions
Your organization might have access to this article on the publisher's site. To check,
click on this link:http://dx.doi.org/+10.1063/1.116528
A cantilever with an integrated ZnO piezoelectric actuator in feedback with a piezoresistive sensor is utilized in an atomic force microscope (AFM) to achieve a new high speed imaging technique. The imaging bandwidth is increased from 0.6 to 6 kHz by bending the cantilever over sample topography with the actuator rather than moving the sample with a 2 in. piezotube. Images taken in the constant force mode with a 3 mm/s tip velocity of a sample containing 2 μm vertical steps are presented. The effects of electrical coupling from the actuator were eliminated by measuring the piezoresistor sensor with a lock‐in amplifier. © 1996 American Institute of Physics.
Applied Physics Letters
Date of Publication:
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.