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Epitaxial GaN on Si(111): Process control of SiNx interlayer formation

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2 Author(s)
Rawdanowicz, T.A. ; Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695 ; Narayan, J.

Author(s)

Rawdanowicz, T.A.
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695
Narayan, J.