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Adhesive forces investigation on a silicon tip by contact-mode atomic force microscope

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4 Author(s)
Agache, V. ; Institut d’Electronique et de Microélectronique du Nord, ISEN Department UMR CNRS 8520, Cité scientifique, Avenue Poincaré, B.P. 69, F-59652 Villeneuve d’Ascq Cedex, France ; Legrand, Bernard ; Collard, D. ; Buchaillot, L.

Author(s)

Agache, V.
Institut d’Electronique et de Microélectronique du Nord, ISEN Department UMR CNRS 8520, Cité scientifique, Avenue Poincaré, B.P. 69, F-59652 Villeneuve d’Ascq Cedex, France
Legrand, Bernard ; Collard, D. ; Buchaillot, L.