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Solid phase epitaxial regrowth of Si1-xGex/Si strained‐layer structures amorphized by ion implantation

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5 Author(s)
Chilton, B.T. ; Centre for Electrophotonic Materials and Devices, McMaster University, Hamilton, Ontario L8S 4M1, Canada ; Robinson, B.J. ; Thompson, D.A. ; Jackman, T.E.
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Author(s)

Chilton, B.T.
Centre for Electrophotonic Materials and Devices, McMaster University, Hamilton, Ontario L8S 4M1, Canada
Robinson, B.J. ; Thompson, D.A. ; Jackman, T.E. ; Baribeau, J.‐M.