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Modulated precursor flow epitaxial growth of AlN layers on native AlN substrates by metal-organic chemical vapor deposition

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8 Author(s)
Kim, Hee Jin ; Center for Compound Semiconductors and School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Dr. NW, Atlanta, Georgia 30332-0250, USA ; Choi, Suk ; Dongwon Yoo ; Ryou, Jae-Hyun
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Author(s)

Kim, Hee Jin
Center for Compound Semiconductors and School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Dr. NW, Atlanta, Georgia 30332-0250, USA
Choi, Suk ; Dongwon Yoo ; Ryou, Jae-Hyun ; Dupuis, Russell D. ; Dalmau, R.F. ; Lu, P. ; Sitar, Z.