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Growth of GaN film on 150 mm Si (111) using multilayer AlN/AlGaN buffer by metal-organic vapor phase epitaxy method

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9 Author(s)
Kung-Liang Lin ; Department of Materials Science and Engineering, National Chiao Tung University, Taiwan ; Chang, Edward-Yi ; Yu-Lin Hsiao ; Huang, Wei-Ching
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Author(s)

Kung-Liang Lin
Department of Materials Science and Engineering, National Chiao Tung University, Taiwan
Chang, Edward-Yi ; Yu-Lin Hsiao ; Huang, Wei-Ching ; Li, Tingkai ; Tweet, Doug ; Maa, Jer-Shen ; Hsu, Sheng-Teng ; Lee, Ching-Ting