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Noncontact deep level photo-thermal spectroscopy: Technique and application to semi-insulating GaAs Wafers

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2 Author(s)
Xia, Jun ; Center for Advanced Diffusion-Wave Technologies (CADIFT), Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, Ontario, M5S 3G8, Canada ; Mandelis, Andreas

Author(s)

Xia, Jun
Center for Advanced Diffusion-Wave Technologies (CADIFT), Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, Ontario, M5S 3G8, Canada
Mandelis, Andreas