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Poly-Si Thin-Film Transistor Nonvolatile Memory Using Ge Nanocrystals as a Charge Trapping Layer Deposited by the Low-Pressure Chemical Vapor Deposition

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4 Author(s)
Po-Yi Kuo ; Dept. of Electrophys., Nat. Chiao Tung Univ., Hsinchu ; Tien-Sheng Chao ; Jyun-Siang Huang ; Lei, Tan‐Fu

Author(s)

Po-Yi Kuo
Dept. of Electrophys., Nat. Chiao Tung Univ., Hsinchu
Tien-Sheng Chao ; Jyun-Siang Huang ; Lei, Tan‐Fu