Epitaxial manganese substituted M-type barium ferrite thin films are deposited by alternating target laser ablation deposition (ATLAD) of BaFe2O4, Fe2O3, and MnFe2O4 targets. The crystal structure and the epitaxy of the films are investigated by X-ray diffraction. Surface morphology is studied by atomic force microscopy. Magnetic properties of the films are characterized by vibrating sample magnetometry and magnetization as a function of temperature measurements. Ferromagnetic resonance (FMR) measurements are utilized to study the dynamic properties of the films. Possible mechanisms for main FMR linewidth broadening as a result of Mn substitution, such as increased conductivity and the presence of Jahn-Teller effect associated with octahedrally coordinated Mn3+ cations, are briefly discussed. Extended absorption X-ray fine structure measurements are performed to determine the cation distribution in the hexagonal unit cell. The observed 15-20% increase in saturation magnetization at 4 K and 50 K increase in the Neel temperature in comparison to bulk reference values are attributed to differences in cation distribution as a result of atomic scale deposition by the ATLAD technique.