; State Key Laboratory on Intergrated Optoelectronics/Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering. Tsinghua University. Beijing 100084, China
Guangyi Xi more authors
Using Pseudo-Voigt functions instead of Gauss or Lorentz functions to fit HR-XRD curves, the widely used Williamson-Hall plot was modified. Then the mosaic structure parameters of various GaN-films were precisely determined by this method.