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Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement

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6 Author(s)
Jin Hyuk Kim ; Microsystem research center, Korea Institute of Science and Technology, Korea ; Sung Il Chu ; Ho Won Seo ; Jae Wook Ryu
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Author(s)

Jin Hyuk Kim
Microsystem research center, Korea Institute of Science and Technology, Korea
Sung Il Chu ; Ho Won Seo ; Jae Wook Ryu ; Gye Tae Kim ; Sung Moon