Dielectric films using ceramic materials with various dielectric properties were deposited by aerosol deposition at room temperature, and examined those electrical properties. We selected CaZrO3, CaTiO3, SrTiO3, (Ba,Ca)TiO3, Ba(Zr,Ti)O3. Thick films that retained same crystal systems as raw powder materials could obtain in the same deposition condition using helium gas. CaTiO3 film with 20 mum thickness or more were obtained using the powder with 0.3 mum mean diameter. With regard to relative permittivities, CaZrO3 film had the same value as the sintered body which had relatively low relative permittivity and it's 22, on the other hand, in the case of other high relative permittivity materials, all values were in the range of 50 to 94. These value were slightly improved by heat treatment at 573 K for 2 h.