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Unified Model of Damage Annealing in CMOS, from Freeze-In to Transient Annealing

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2 Author(s)
Sander, H.H. ; Sandia Laboratories, Albuquerque, New Mexico 87115 ; Gregory, B.L.

Author(s)

Sander, H.H.
Sandia Laboratories, Albuquerque, New Mexico 87115
Gregory, B.L.