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Fabrication of Stacked NbN/TiNx/NbN Josephson Junctions Using an Inductively Coupled Plasma Etching Technique

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3 Author(s)
Akira Shoji ; Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba ; Nobuko Koda ; Hirotake Yamamori

Author(s)

Akira Shoji
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Nobuko Koda ; Hirotake Yamamori