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Nanometre electrode fabrication technology using anodic oxidation resist films and applications to 10 GHz surface acoustic wave devices

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5 Author(s)
Yamanouchi, K. ; Res. Inst. of Electr. Commun., Tohoku Univ., Sendai ; Meguro, T. ; Wagatsuma, Y. ; Odagawa, H.
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Author(s)

Yamanouchi, K.
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai
Meguro, T. ; Wagatsuma, Y. ; Odagawa, H. ; Yamamoto, K.