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High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing

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8 Author(s)
Scholz, T. ; Inst. of Microstruct. Technol. & Anal., Kassel Univ. ; Depski, T. ; Romer, F. ; Irmer, S.
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Author(s)

Scholz, T.
Inst. of Microstruct. Technol. & Anal., Kassel Univ.
Depski, T. ; Romer, F. ; Irmer, S. ; Viereck, V. ; Bartels, M. ; Barth, W. ; Hillmer, H.