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Nickel Germanosilicide contacts formed on heavily boron doped Si1-xGex source/drain junctions for nanoscale CMOS

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2 Author(s)
Jing Liu ; North Carolina State Univ., Raleigh, NC, USA ; Ozturk, Mehmet C.

Author(s)

Jing Liu
North Carolina State Univ., Raleigh, NC, USA
Ozturk, Mehmet C.