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Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding

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5 Author(s)
Christiaens, I. ; Photonics Res. Group, Ghent Univ.-IMEC, Gent, Belgium ; Roelkens, G. ; Kurt De Mesel ; Van Thourhout, D.
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Author(s)

Christiaens, I.
Photonics Res. Group, Ghent Univ.-IMEC, Gent, Belgium
Roelkens, G. ; Kurt De Mesel ; Van Thourhout, D. ; Baets, R.