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Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

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2 Author(s)
Yong-Jae Joo ; Dept. of Ind. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea ; Tae-Eog Lee

Author(s)

Yong-Jae Joo
Dept. of Ind. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea
Tae-Eog Lee