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Analysis and analytical modeling of static pull-In with application to MEMS-based voltage reference and process monitoring

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3 Author(s)
Rocha, L.A. ; Dept. for Microelectron., Delft Univ. of Technol., Netherlands ; Cretu, E. ; Wolffenbuttel, R.F.

Author(s)

Rocha, L.A.
Dept. for Microelectron., Delft Univ. of Technol., Netherlands
Cretu, E. ; Wolffenbuttel, R.F.