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Room temperature wafer bonding by elastomeric polymer-supported cold welding

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3 Author(s)
W. Y. Zhang ; Dept. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA, USA ; G. S. Ferguson ; S. Tatic-Lucic

Author(s)

W. Y. Zhang
Dept. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA, USA
G. S. Ferguson ; S. Tatic-Lucic